Silicon carbide for microelectromechanical systems

By M. Mehregany, C. Zorman, Shuvo Roy, Aaron J. Fleischman, Wu C.-H., N. Rajan. 2000

142 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/dc9e763f2f424a9d4a0d1a9f3b5cbb3df9b901ac

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. A. Pisano

Citations in the corpus

• A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications (2007, background): “can be made with high purity, making SiC an attractive alternative to Si in high radiation [10], high temperature and corrosive environment electronics applications [11].”