Atomic layer deposited protective coatings for micro-electromechanical systems

By Nils Hoivik, Jeffrey W. Elam, R. Linderman, V. Bright, S. George, Yung-Cheng Lee. 2003

139 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/dbc23d0eec56abf5618634d1b21dea4e38b313d3

Citations in the corpus

• The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems (2006, unknown): “Recently ALD films have been applied to polysilicon microstructures as protective coatings [ 1 ], creep suppression coatings [2], coatings preventing diffusional-transport [3], wear resistant coatings [4], and hydrophobic coatings [5].”