The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems

By M. Tripp, Christoph Stampfer, David C. Miller, T. Helbling, C. Herrmann, Christofer Hierold, Ken Gall, S. George, V. Bright. 2006

211 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/13395638c67cf12966d15a130685aa24c21aa807