On the scaling issues and high-κ replacement of ultrathin gate dielectrics for nanoscale MOS transistors

By H. Wong, H. Iwai. 2006

372 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/db94af03324c6584b0a5daece319c1e8d1f4c0d5

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In Electrical and Electronic Engineering

  1. D. Fleetwood

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