Crystallization behavior of thin ALD-Al2O3 films

By S. Jakschik, Uwe Schroeder, T. Hecht, M. Gutsche, H. Seidl, J. Bartha. 2003

231 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/da1844d4e7714d8a1409a43b199d9cc6222ba8de