PRECISE POSITIONING OF PIEZO-ACTUATED STAGES USING HYSTERESIS-OBSERVER BASED CONTROL
By Chih-Jer Lin, Shengfeng Yang. 2006
183 citations recorded by the source corpus.
Subfields: Control and Systems Engineering, Materials Chemistry
View Paper: https://www.semanticscholar.org/paper/d6d15dcb360270e015939359b5a05d03a84cab73
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In Control and Systems Engineering
In Materials Chemistry
Citations in the corpus
- Adaptive Sliding Mode Control With Perturbation Estimation and PID Sliding Surface for Motion Tracking of a Piezo-Driven Micromanipulator (2010, background): “Considering that most hysteresis models are only applicable with some particular input signal frequencies, a feedforward combined with feedback control is usually adopted for a precision motion tracking [4], [5].”