High-κ Dielectric Materials for Microelectronics

By Robert M. Wallace, G. Wilk. 2003

188 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d43fd0a2f262a0906272e853ba9ffdb9699e1e05

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Ya. I. Alivov
2. Hadis Morkoç
3. Natalia Izyumskaya

In Materials Chemistry

1. Hadis Morkoç
2. Ya. I. Alivov
3. Natalia Izyumskaya

Citations in the corpus

• Oxides, Oxides, and More Oxides: High-κ Oxides, Ferroelectrics, Ferromagnetics, and Multiferroics (2009, background): “The benefits of high-κ dielectrics can be clearly understood from Equation [1], which represents an equivalent oxide thickness (EOT) t |eq , a quantity used to compare performance of high-κ dielectric MOS gates with performance of SiO2-based MOS gates.”