Microelectromechanical systems (MEMS): fabrication, design and applications

821 citations recorded by the source corpus.

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

Permanent Magnets for MEMS (2009, background): “For example, it has been argued that magnetic actuators are more favorable than electrostatic actuators when the actuation gap is greater than ∼2 μm [5].”
Design of Piezoresistive MEMS-Based Accelerometer for Integration with Wireless Sensing Unit for Structural Monitoring (2003, background): “An additional advantage of MEMS sensors is their ability to monolithically fabricate signal conditioning circuitry on the same die resulting in improved sensor performance and reduced sensor costs (Judy 2001).”
Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications (2005, methodology): “In this work the design of the proposed three-axial force sensor has been performed simultaneously to the design of its packaging with the aim of developing a flexible smart interface for biomechanical measurements.”