Thin Film Materials Technology: Sputtering of Compound Materials

By K. Wasa, H. Adachi, M. Kitabatake. 2004

213 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/d2542f471ebc51931f9e55a2ad1b6bc2c7d4c0eb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. A. R. Bushroa
2. M. Muhamad
3. H. Masjuki
4. R. Rahbari

Citations in the corpus

• Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films (2012, background): “The peeling of the deposited film from its substrate is an indicator of the critical film thickness [23].”