Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films

By A. R. Bushroa, R. Rahbari, H. Masjuki, M. Muhamad. 2012

213 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Condensed Matter Physics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/587b19958e5ef16788f0da019afcf287a771a3c4