How accurate are Stoney’s equation and recent modifications

By C. Klein. 2000

305 citations recorded by the source corpus.

Subfields: Electronic, Optical and Magnetic Materials, Mechanics of Materials, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/ce21aa28ae27b0011d9bf72642f3a7e5383855a8

How researchers see this paper

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In Mechanics of Materials

1. W. Nix
2. George Z. Voyiadjis
3. J. Greer
4. J. Vlassak

Citations in the corpus

• What is the Young's Modulus of Silicon? (2010, background): “Some membranes have symmetric boundary conditions along the equivalent orthogonal axes, such as the curvature of a wafer induced by thin-film stress, which is typically calculated with Stoney’s equation [28], or the deformation of membranes under pressure.”
• Durability of nanosized oxygen-barrier coatings on polymers (2003, unknown): “[178,182].”