Simulation and experimental study of polymer deformation in nanoimprint lithography
By Y. Hirai, T. Konishi, T. Yoshikawa, S. Yoshida. 2004
163 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/cd150678d31c189994e6ea673246d6488ddcf5b5
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In Electrical and Electronic Engineering
Citations in the corpus
- Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography (2005, methodology): “Other simulations and experiments [10, 11] investigated purely nanometer scale geometries and film thicknesses.”