Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride

By Jan Schmidt, M. Kerr. 2001

143 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/ccf0b2f6251b67128e604d8652c68b820e3655ae