Ultrasensitive nanoelectromechanical mass detection
By K. Ekinci, X.M.H. Huang, Michael L. Roukes. 2004
587 citations recorded by the source corpus.
We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh-vacuum environment. The mass-induced resonance frequency shifts by these adsorbates were then measured to ascertain a mass sensitivity of 2.53×10^–18 g. In these initial measurements, this sensitivity is limited by the noise in the NEMS displacement transducer; the ultimate limits of the technique are set by fundamental phase noise processes. Our results and analysis indicate that mass sensing of individual molecules will be realizable with optimized NEMS devices.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/cc88531588e1c8efb28f811cb0ae1ca05588225f
How researchers see this paper
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In Atomic and Molecular Physics, and Optics
- Herre S. J. van der Zant
- Menno Poot
- Eyal Buks
- Stav Zaitsev
- Oleg Shtempluck
- Oded Gottlieb
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In Electrical and Electronic Engineering
- Herre S. J. van der Zant
- Menno Poot
- Eyal Buks
- Stav Zaitsev
- Oleg Shtempluck
- Oded Gottlieb
- Wayne Hiebert
- X. Feng
Citations in the corpus
- Toward single-molecule nanomechanical mass spectrometry (2005, background): “In this work, the exceptional mass sensitivity of ultrahigh-frequency (UHF) NEMS resonator”
- Mechanical systems in the quantum regime (2011, background): “Finally, NEMS may find an application in mass sensing [352, 353, 78, 77, 76, 354, 97, 355]: the state-of-the art is that single gold atoms can be measured (see Sec.”
- Resonant behavior of a membrane of a dielectric elastomer (2010, methodology): “Examples include MEMS-based oscillators used in sensing (Ekinci et al., 2004), timing, and frequency reference (Nguyen, 2007).”
- An atomic-resolution nanomechanical mass sensor. (2008, background): “Although many previous attempts at precision mass sensing have focused on doubly clamped geometrie”
- Cantilever-like micromechanical sensors (2011, background): “Recently, systems capable of detecting masses in the atto- and zepto-gram (10−18– 10−21 g) range have been reported [27, 28], and the claim is that yocto-gram sensitivity is within reach [29].”