The introduction of powder blasting for sensor and microsystem applications

By E. Belloy, S. Thurre, E. Walckiers, A. Sayah, M. Gijs. 2000

168 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Ecological Modeling, Ocean Engineering

View Paper: https://www.semanticscholar.org/paper/cc2f6e1e23582e6852e58f29ac97328e00eca7ad

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. A. Evans
2. Minqiang Bu
3. J. Wilkinson
4. T. Melvin
5. G. Ensell
6. Ciprian Iliescu

Citations in the corpus

• A new masking technology for deep glass etching and its microfluidic application (2004, methodology): “MEMS devices, such as micro-accelerometers [1,2] and micro-XY-stage actuators [3] fabricated using glass etching technology have been reported.”