Thin Film Analysis by X-Ray Scattering

By M. Birkholz. 2005

564 citations recorded by the source corpus.

View Paper: https://www.semanticscholar.org/paper/c8e78b1c6d652d72f8a398760c2da4103fe38d7e

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1. H. Masjuki
2. M. Klaus
3. C. Genzel
4. A. R. Bushroa
5. M. Muhamad
6. J. Gibmeier
7. G. Wagener
8. R. Rahbari

Citations in the corpus

• Approximation of crystallite size and microstrain via XRD line broadening analysis in TiSiN thin films (2012, background): “The broadening due to strain is caused by the non-uniform displacements of the atoms with respect to their reference-lattice positions [4].”
• The materials science synchrotron beamline EDDI for energy-dispersive diffraction analysis (2007, background): “[17–19]) and so only a very brief summary regarding some important aspects of a depth-resolved analysis of the strain/stress fields below the surface will be given here.”