Optical Imaging in Projection Microlithography

By A. Wong. 2005

149 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c713cf4846df8a9150c0f2b6c6cf91da8ba94721

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Stephen Y. Chou
2. R. F. Pease
3. G. Horowitz

Citations in the corpus

• Lithography and Other Patterning Techniques for Future Electronics (2008, background): “Again, this is a large topic, and more complete descriptions can be found in [6].”