Lithography and Other Patterning Techniques for Future Electronics

By R. F. Pease, Stephen Y. Chou. Proceedings of the IEEE, 2008

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Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “For the past decades, photolithography has been the key technology in manufacturing of ICs, microchips and MEMS devices including micro accelerometers, DMDs, MEMS pressure sensors, micropumps, microvalves, optical switches, inkjet heads, microgrippers, and microactuators.”
Nanomanufacturing—Perspective and applications (2017, background): “Masked lithography is suitable for mass production, usually with a minimum feature size of several micrometers [168].”
Technologies for Printing Sensors and Electronics Over Large Flexible Substrates: A Review (2015, background): “previously have reviewed some of the printing technologies individually [17]–[19], [30]–[37].”
Flexible Tactile Sensors Using Screen-Printed P(VDF-TrFE) and MWCNT/PDMS Composites (2015, background): “The rapid growth of the field is in line with the electronics roadmap, which indicates the merge of the well-established microelectronics technology with the age-old printing tools to realize electronic systems with simplified processing steps, reduced materials wastage, high throughput, low fabrica”