Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

By M. Ho, H. Gong, G. Wilk, B. Busch, Martin L. Green, P. Voyles, D. Muller, M. Bude, W. H. Lin, A. See and 3 more. 2003

181 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/c3f97412c9c645ba4baf0b01305d888e24ff6b56