VLSI-NEMS chip for parallel AFM data storage

By M. Despont, J. Brugger, U. Drechsler, U. Dürig, W. Häberle, M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig and 2 more. 2000

150 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c0b71be1c7dfe8fd255cb571ff6bc5222bc0e4d1

Citations in the corpus

• Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters (2006, unknown): “This thermal runaway has a well-behaved temperature dependence and has therefore been used as a temperature reference for the heated cantilever [10], [19].”