A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

By G. Greczynski, Jun Lu, J. Jensen, S. Bolz, W. Kölker, C. Schiffers, O. Lemmer, J. Greene, L. Hultman. 2014

150 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/bd36be78b16a8c4238b0b9c8bbd3f463fe17b9b4