First fully integrated 2-D array of single-photon detectors in standard CMOS technology

By A. Rochas, M. Gösch, A. Serov, P. Besse, R. Popovic, Theo Lasser, R. Rigler. IEEE Photonics Technology Letters, 2003

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SPAD Figures of Merit for Photon-Counting, Photon-Timing, and Imaging Applications: A Review (2016, background): “Concerning the imaging performance, Table III reports the performance of SPAD arrays designed only for photon counting imaging applications as reported in [5], [17], [19], [21], [26]–[28], and [64]–[69].”
Progress in Quenching Circuits for Single Photon Avalanche Diodes (2010, unknown): “In fact, [13] reports a total dead time of 32 ns and a maximum counting rate of 20 MHz; however, in this case most of the avalanches are triggered during reset, since the reset time constant is reported to be about 30 ns.”
Progress in Silicon Single-Photon Avalanche Diodes (2007, background): “Chips with more detectors and associated circuitry can be implemented readily [20], as well as complete photon-counting”
Design and characterization of a CMOS 3-D image sensor based on single photon avalanche diodes (2005, background): “In [9], an 8 4 array of single photon avalanche diodes (SPADs) integrated in a conventional CMOS technology was presented.”