Plane-strain Bulge Test for Thin Films

By Y. Xiang, Xiangshan Chen, J. Vlassak. 2005

250 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/b77274a13d4fc78982553a2bef7dfb33b4a6af52

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Han Li
2. J. Vlassak
3. V. Giessen
4. A. Needleman

In Electronic, Optical and Magnetic Materials

1. Han Li
2. J. Vlassak

In Mechanics of Materials

1. J. Vlassak
2. Han Li
3. Y. Xiang
4. V. Giessen
5. A. Needleman
6. Ted Belytschko
7. R. de Borst
8. Timon Rabczuk

Citations in the corpus

• Plastic deformation of freestanding thin films: Experiments and modeling (2006, methodology): “…strain in the membrane are determined from the applied pressure, p, and the corresponding membrane deflection, d, using the following expressions (Xiang et al., 2005): s ¼ pða 2 þ d2Þ 2dh ; ¼ 0 þ ða2 þ d2Þ 2ad arcsin 2ad ða2 þ d2Þ 1, (1) where h is the film thickness, 2a the width of the…”
• Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation (2009, methodology): “The stress-strain curve of the Si3N4 film was extracted from the load-deflection data using the method described in reference [22].”