Effective Passivation of AlGaN/GaN HEMTs by ALD-Grown AlN Thin Film

By Sen Huang, Q. Jiang, Shu Yang, Chunhua Zhou, Kevin J. Chen. IEEE Electron Device Letters, 2012

222 citations recorded by the source corpus.

Subfields: Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b688a8c669bdf3f0228bbcdde88cb0429529be47