Large Remnant Polarization in a Wake-Up Free Hf0.5Zr0.5O2 Ferroelectric Film through Bulk and Interface Engineering

By Alireza Kashir, Hyungwoo Kim, Seungyeol Oh, Hyunsang Hwang. 2021

144 citations recorded by the source corpus.

A wake-up free Hf0.5Zr0.5O2 (HZO) ferroelectric film with the highest remnant polarization (Pr) value to date was achieved through tuning of the ozone pulse duration, the annealing process, and the...

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b58d204880ad41f3f20c3a30c610c1c1f58bd6f9