Atomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics

By Supratik Guha, Eduard A. Cartier, M. Gribelyuk, N. Bojarczuk, M. Copel. 2000

234 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b56073018b467cbda40fd534b7ebcbb00c7c7d68