TriPleX: a versatile dielectric photonic platform

By K. Wörhoff, R. Heideman, A. Leinse, M. Hoekman. 2015

233 citations recorded by the source corpus.

Abstract Photonic applications based on planar waveguide technology impose stringent requirements on properties such as optical propagation losses, light coupling to optical fibers, integration density, as well as on reliability and reproducibility. The latter is correlated to a high level of control of the refractive index and waveguide geometry. In this paper, we review a versatile dielectric waveguide platform, called TriPleX, which is based on alternating silicon nitride and silicon dioxide films. Fabrication with CMOS-compatible equipment based on low-pressure chemical vapor deposition enables the realization of stable material compositions being a prerequisite to the control of waveguide properties and modal shape. The transparency window of both materials allows for the realization of low-loss waveguides over a wide wavelength range (400 nm–2.35 μm). Propagation losses as low as 5×10-4 dB/cm are reported. Three basic geometries (box shell, double stripe, and filled box) can be distinguished. A specific tapering technology is developed for on-chip, low-loss (<0.1 dB) spotsize convertors, allowing for combining efficient fiber to chip coupling with high-contrast waveguides required for increased functional complexity as well as for hybrid integration with other photonic platforms such as InP and SOI. The functionality of the TriPleX platform is captured by verified basic building blocks. The corresponding library and associated design kit is available for multi-project wafer (MPW) runs. Several applications of this platform technology in communications, biomedicine, sensing, as well as a few special fields of photonics are treated in more detail.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b4fea2ee5121e4f6c2ee7f92dc8f66ec91904f5d

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Expanding the Silicon Photonics Portfolio With Silicon Nitride Photonic Integrated Circuits (2017, unknown): “Currently the MPW access to SiN-based silicon photonics is provided by LioniX using their trademark material platform called TriPleX [44].”
Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview (2018, methodology): “used deposition techniques, another factor that is important for low-loss propagation of light is the sidewall roughness or line edge roughness (LER), which is determined by the details of the photolithographic process and the etching technique that is used for the waveguide definition (Table III, s”
Advances in quantum cryptography (2019, unknown): “The SiO2-Si3N4 TriPleX technology has record low loss passive components at ∼ 10−4 dB/cm [290] which makes it an attractive platform for time-based or phasebased QKD receiver components in high-speed gigahertzclocked QKD operations, where Bob has to interfere weak coherent pulses spaced by ∼ 1 ns.”
Large-scale quantum photonic circuits in silicon (2016, background): “Improved fabrication processes, such as surface oxidation [53], may enable further reductions in photon loss.”
Silicon Nitride in Silicon Photonics (2018, methodology): “The single- and double-stripe geometries are part of the TriPleX foundry platform [13], [52] and used in the ultralow-loss waveguides developed at the University of California Santa Barbara (UCSB) [53].”
Hybrid integration of silicon photonics circuits and InP lasers by photonic wire bonding (2018, background): “These devices are best realized on the basis of a medium index-contrast material system such as the commercial integration platform TriPleX [42].”