Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview
By Chris G. H. Roeloffzen, M. Hoekman, E. Klein, L. Wevers, R. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans and 18 more. IEEE Journal of Selected Topics in Quantum Electronics, 2018
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An overview of the most recent developments and improvements to the low-loss TriPleX Si3N4 waveguide technology is presented in this paper. The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic process flow to create a compact photonic integrated circuit. All functionalities of the integrated circuit are constructed using standard basic building blocks, namely straight and bent waveguides, splitters/combiners and couplers, spot size converters, and phase tuning elements. The basic functionalities that have been realized are: ring resonators and Mach–Zehnder interferometer filters, tunable delay elements, and waveguide switches. Combination of these basic functionalities evolves into more complex functions such as higher order filters, beamforming networks, and fully programmable architectures. Introduction of the active InP chip platform in a combination with the TriPleX will introduce light generation, modulation, and detection to the low-loss platform. This hybrid integration strategy enables fabrication of tunable lasers, fully integrated filters, and optical beamforming networks.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/4a01f32a10392efd9fcd73d5196fda53e4b906d7
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In Electrical and Electronic Engineering
Citations in the corpus
- Review of Silicon Photonics Technology and Platform Development (2021, background): “1 μm to 4 μm [59], [60], [44], SiN covers a broad operation range from visible (∼400 nm) to the mid-infrared wavelength (∼4 μm), expanding the PIC to various applications, such as biochemical sensors at visible light [61], [62], LiDAR application [63], telecom and datacom [64], and optical gas sensi”
- Silicon Nitride in Silicon Photonics (2018, methodology): “The single- and double-stripe geometries are part of the TriPleX foundry platform [13], [52] and used in the ultralow-loss waveguides developed at the University of California Santa Barbara (UCSB) [53].”