Characteristics and fabrication of NiTi/Si diaphragm micropump

By Dong Xu, Li Wang, G. Ding, Yong Zhou, Aibin Yu, B. Cai. 2001

157 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b211ef9e948a3f4bdfa64de626b93e4bd89ec8ab

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Nitin V. Afzulpurkar
2. Banchong Mahaisavariya
3. Adisorn Tuantranont
4. Asim Nisar
5. Wenyi Huang

In Electrical and Electronic Engineering

1. Nitin V. Afzulpurkar
2. Banchong Mahaisavariya
3. Adisorn Tuantranont
4. Asim Nisar

Citations in the corpus

• TiNi-based thin films in MEMS applications: a review (2004, background): “The advantages of using TiNi/Si membrane as the driving diaphragm include [72]: (1) large actuation force; (2) simplicity in process and no special bias structure needed because the silicon substrate can provide bias force; and (3) no isolating structure is needed because silicon structure can separ”
• MEMS-based micropumps in drug delivery and biomedical applications (2008, background): “[59] reported the structure of a micro SMA pump.”