Atomic Layer Deposition of Iridium Thin Films

By Titta Aaltonen, Mikko Ritala, V. Sammelselg, Markku Leskelä. 2004

139 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b2073d324ff2862686d09b33478e606d43f92406