Chemistry for Positive Pattern Transfer Using Area‐Selective Atomic Layer Deposition

By Rong Chen, S. Bent. 2006

151 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/b0da5f32fa537ef7dfbbd8aff2f1c9677a1146c6

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. H. M. Saavedra
2. T. Mullen
3. Pengpeng Zhang
4. D. Dewey
5. P. Weiss
6. Shelley A. Claridge

Citations in the corpus

• Hybrid strategies in nanolithography (2010, background): “Here, the sequential self-limiting steps of ALD enable precise control over film thickness, composition and uniformity [368].”