Hybrid strategies in nanolithography

By H. M. Saavedra, T. Mullen, Pengpeng Zhang, D. Dewey, Shelley A. Claridge, P. Weiss. 2010

172 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/253dc6caf96e6f935e56495a8d133d86a8cf31eb