Applications of SOI-based optical MEMS

By W. Noell, Pierre-André Clerc, L. Dellmann, B. Guldimann, H. Herzig, Omar, Manzardo, C. Marxer, Ken Weible, R. Dändliker and 1 more. 2002

142 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b0ccd7c8595172c15e7804bd9827a29cf3a45ff7

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. K. Kato
2. A. Morosawa
3. Hiroyuki Fujita
4. K. Isamoto
5. H. Toshiyoshi
6. C. Chong
7. Ming C. Wu
8. B. Borovic

Citations in the corpus

• A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining (2004, background): “Rotating or sliding a mirror near a coupled pair of lens fibers [4]–[6] [Fig.”