A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining

By K. Isamoto, K. Kato, A. Morosawa, C. Chong, Hiroyuki Fujita, H. Toshiyoshi. IEEE Journal of Selected Topics in Quantum Electronics, 2004

137 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/89033d4bad945c99d5eebab0398a4ba15a1e36b3

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Olav Solgaard

In Electrical and Electronic Engineering

1. Olav Solgaard
2. Joseph E. Ford
3. Frank L. Lewis
4. Ming C. Wu
5. Kyriakos G. Vamvoudakis
6. Hamidreza Modares
7. Derong Liu
8. Zhong-Ping Jiang

Citations in the corpus

• Open-loop versus closed-loop control of MEMS devices: choices and issues (2005, methodology): “On the other hand, the VOA is typically used to condition the optical signal intensity after laser diodes, before fiber-optic amplifiers and photo-detectors [15].”
• Optical MEMS for Lightwave Communication (2006, methodology): “For example, the device demonstrated by Isamoto et al. [19] achieved 40-dB attenuation with a 600-µm mirror driven with 5 V to tilt up to 0.3 • .”