Comparative Study of Acoustic Wave Devices Using Thin Piezoelectric Plates in the 3–5-GHz Range

By Tetsuya Kimura, Masashi Omura, Yutaka Kishimoto, K. Hashimoto. IEEE transactions on microwave theory and techniques, 2019

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This paper investigates the applicability of acoustic wave devices using an interdigital transducer placed on a thin piezoelectric crystal plate to the 3–5-GHz range, where significant performance degradation was expected in surface acoustic wave (SAW) devices. Three types of the SAW-like devices were fabricated by using a KrF stepper/scanner, and their performances are compared from various aspects: 1) a 3.5-GHz resonator using a rotated <inline-formula> <tex-math notation="LaTeX">$Y$ </tex-math></inline-formula>-cut LiTaO<sub>3</sub> plate attached on a Si substrate; 2) a 5-GHz resonator using a <inline-formula> <tex-math notation="LaTeX">$X$ </tex-math></inline-formula>-cut LiNbO<sub>3</sub> plate on a Si substrate; and 3) a 5.4-GHz <inline-formula> <tex-math notation="LaTeX">$A_{1}$ </tex-math></inline-formula> Lamb mode resonator on a free-standing <inline-formula> <tex-math notation="LaTeX">$Z$ </tex-math></inline-formula>-cut LiNbO<sub>3</sub> plate. It is revealed that these devices offer excellent performances even in the 3–5-GHz range.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/aec10644fee38bd5a98b87e7118391eeb92447bd

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