Recent progress in nanoimprint technology and its applications
By L Jay Guo. 2004
279 citations recorded by the source corpus.
Subfields: Biomedical Engineering, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/a6487206755c7b3343b71b8796ff03ec8624298d
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In Biomedical Engineering
In Electrical and Electronic Engineering
Citations in the corpus
- Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “Adding a Si-containing material can also address this problem [66].”
- Micro hot embossing of thermoplastic polymers: a review (2013, background): “Basically, thermoplastic polymers experience the glassy state, rubbery state and flow state in succession with the increase of temperature, as illustrated in figure 3 [21, 22].”