On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator

By Bei-Bei Li, Qing-Yan Wang, Yun-Feng Xiao, Xuefeng Jiang, Yan Li, Lixin Xiao, Qihuang Gong. 2010

152 citations recorded by the source corpus.

A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change in the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from redshift to blueshift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultrahigh resolution of the thermal sensor is also analyzed to reach 10−4 K.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a5f39a902982ad62c7692eaf64382450d6526367

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In Atomic and Molecular Physics, and Optics

1. Matthew R. Foreman
2. J. Swaim
3. Frank Vollmer

In Electrical and Electronic Engineering

1. Matthew R. Foreman
2. J. Swaim
3. Frank Vollmer

Citations in the corpus

• Whispering gallery mode sensors (2015, methodology): “A similar approach is applicable on chip by coating silica toroidal microresonators on silicon wafers with PDMS layers [234].”