High-K materials and metal gates for CMOS applications
By John Robertson, Robert M. Wallace. 2015
712 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/a56c50b0068efa256bc392aa40ec34f8a23b77f2
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In Atomic and Molecular Physics, and Optics
In Electrical and Electronic Engineering
Citations in the corpus
- Electric double-layer transistors: a review of recent progress (2015, neutral): “2 nm) has been developed, while it results in high gate leakage current due to direct tunneling of electrons through the SiO2, exceeding 1 A/cm 2 [8].”
- Dielectric Properties of ZnO-Based Nanocomposites and Their Potential Applications (2021, methodology): “High-k materials are used as gate dielectrics in MOS transistors, memory cells, capacitors, supercapacitors [2, 3], and so forth, whereas low-k materials find their applications in electrical insulation and high-speed integrated circuits [4].”
- Electronic properties of hafnium oxide: A contribution from defects and traps (2016, neutral): “Presently, it is widely recognized that the most thermodynamically favourable defects in hafnium oxide are oxygen vacancies (VO) [1,4,5,36].”