An insulator-lined silicon substrate-via technology with high aspect ratio

By J. H. Wu, J. Scholvin, J. D. del Alamo. 2001

154 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/a47fc87658b89b02ce4959887d89eeb40371ab81