Invited review article: Atom probe tomography.
By T. Kelly, Michael K. Miller. Review of Scientific Instruments, 2007
778 citations recorded by the source corpus.
The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.
Subfields: Biomedical Engineering, Mechanical Engineering, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/a26ccbe01c80d56839beb96d4d1827eb9f71736e
How researchers see this paper
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In Biomedical Engineering
- Baptiste Gault
- F. Geuser
- Simon P. Ringer
- Michael Moody
- Rachid M'Saoubi
- J. Markmann
- Celal Soyarslan
- Dragos Axinte
In Mechanical Engineering
- Rachid M'Saoubi
- F. Geuser
- Dragos Axinte
- Simon P. Ringer
- A. Clare
- Swantje Bargmann
- Z. Liao
- Baptiste Gault
In Mechanics of Materials
- J. Wilmers
- Rachid M'Saoubi
- J. Markmann
- Celal Soyarslan
- Benjamin Klusemann
- Konrad Schneider
- J. Schnabel
- Simon P. Ringer
Citations in the corpus
- Estimation of the Reconstruction Parameters for Atom Probe Tomography (2008, background): “Over the last 10 years, the field-of-view in the atom probe tomography ~APT! technique has been significantly expanded ~Kelly & Miller, 2007; Seidman, 2007!.”
- Three-dimensional convolutional neural network (3D-CNN) for heterogeneous material homogenization (2020, neutral): “D atom probe [61] and automated serial sectioning [62] have made possible to capture 3D material microstructures.”