Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

By V. Seidemann, S. Bütefisch, S. Büttgenbach. 2002

148 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/a0d819597b68ac8561685cb875cab3174f277974

Citations in the corpus

• TiNi-based thin films in MEMS applications: a review (2004, unknown): “6(a)) [73,74].”