Cross-field ion transport during high power impulse magnetron sputtering
By D. Lundin, Petter Larsson, E. Wallin, M. Lattemann, N. Brenning, Ulf Helmersson. 2008
150 citations recorded by the source corpus.
Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials
View Paper: https://www.semanticscholar.org/paper/a0a1d945f5412fa580256edb6793fcf4a989dab5
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In Electrical and Electronic Engineering
In Materials Chemistry
In Mechanics of Materials
Citations in the corpus
- An introduction to thin film processing using high-power impulse magnetron sputtering (2012, background): “Reprinted from Lundin et al.(49) with permission from the Institute of Physics.”