An introduction to thin film processing using high-power impulse magnetron sputtering

By D. Lundin, K. Sarakinos. 2012

290 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/18c2bcba23db614423eccc0d13e9a693c7f2609d