Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings

By R. Feng, R. Farris. 2002

394 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials

View Paper: https://www.semanticscholar.org/paper/a03ca0a927a0bb6efe35b5d14eead4013107460a

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In Electrical and Electronic Engineering

1. Anne Marie Gué
2. S. Colin
3. P. Abgrall
4. Brian J. Kim
5. Ellis Meng

Citations in the corpus

• Review of polymer MEMS micromachining (2015, neutral): “depending on the processing conditions [51].”
• A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films (2005, background): “Many groups have reported a glass transition temperature of uncrosslinked SU-8 of 65 ◦C but other references indicate a value of 49 ◦C [32].”