Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure

By K. Robbie, G. Beydaghyan, Tim Brown, Cory R. Dean, J. Adams, C. Buzea. 2004

176 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/979a45d65289502273d5835cd84afa2c0e044a85

Citations in the corpus

• Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection (2007, unknown): “Oblique-angle deposition is a vapour-deposition technique widely used to grow nanostructured thin-film materials with controllable porosit”