Microfabrication of ceramic components by microstereolithography

By A. Bertsch, S. Jiguet, Philippe Renaud. 2004

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Xurography: rapid prototyping of microstructures using a cutting plotter (2005, methodology): “Current commercial rapid prototyping methods for microstructures include: micromolding in polydimethylsiloxane (PDMS) [2]–[9], laser ablation [10]–[14], stereo lithography [15], micropowder blasting [10], hot embossing [4], [16], and micromilling [17].”
Cure depth control for complex 3D microstructure fabrication in dynamic mask projection microstereolithography (2009, background): “System advancements have included improved resolution to fabricate more complex 3D microstructures, and new applications are regularly being explored (Bertsch et al., 2004; Sun et al., 2005; Choi et al., 2005, 2006, 2007; Limaye and Rosen, 2007; Lee et al., 2007; Ha et al., 2008; Han et al., 2008).”
Fabrication of multi-layer SU-8 microstructures (2006, background): “Traditionally, thick (>100 μm), highaspect-ratio microstructures have been developed using LIGA [12, 13], microstereolithography [14, 22] and deep reactive ion etching (DRIE) processes [23, 24].”