Atomic Layer Deposition of Noble Metals and Their Oxides

By Jani Hämäläinen, Mikko Ritala, Markku Leskelä. 2014

325 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/9135db995d835234c23b333256873d447b47029c