Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

By J. Verd, A. Uranga, G. Abadal, J. Teva, F. Torres, J. L. Lopez, E. Perez-Murano, Jaume Esteve, N. Barniol. IEEE Electron Device Letters, 2008

136 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/90f2807c81933a4d20453f9eec74b3ac08d09ac6