Chemical nanolithography with electron beams

By A. Gölzhäuser, W. Eck, W. Geyer, V. Stadler, T. Weimann, P. Hinze, M. Grunze. 2001

157 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/8efcd6d96acd1e648f54e7d33bec01b9a3512103

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

1. H. M. Saavedra
2. T. Mullen
3. Pengpeng Zhang
4. D. Dewey
5. Shelley A. Claridge

Citations in the corpus

• Hybrid strategies in nanolithography (2010, background): “Using field-emission scanning electron microscopy, features smaller than 10 nm can be achieved, since the higher electron energies can be tightly focused and patterning no longer requires a mask [95, 96].”