ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

By S. Lim, Soon-Ju Kwon, Hyungjun Kim. 2008

158 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/8edb50591f46628e580ba0fcf2da014cd49f7074